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Analysis and Design Principles of MEMS Devices
Analysis and Design Principles of MEMS Devices
Analysis and Design Principles of MEMS Devices
Analysis and Design Principles of MEMS Devices
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Analysis and Design Principles of MEMS Devices

Analysis and Design Principles of MEMS Devices

An exciting look into how sensors and actuators work

Minhang Bao (Author)

9780444516169, Elsevier Science

Hardback, published 12 April 2005

328 pages

24 x 16.5 x 2.4 cm, 0.76 kg

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis an]

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Analysis and Design Principles of MEMS Devices

Analysis and Design Principles of MEMS Devices

An exciting look into how sensors and actuators work

Minhang Bao (Author)

9780444516169, Elsevier Science

Hardback, published 12 April 2005

328 pages

24 x 16.5 x 2.4 cm, 0.76 kg

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis an]

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Analysis and Design Principles of MEMS Devices

An exciting look into how sensors and actuators work

Minhang Bao (Author)

9780444516169, Elsevier Science

Hardback, published 12 April 2005

328 pages

24 x 16.5 x 2.4 cm, 0.76 kg

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis an]

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Hardcover

Language

English

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Textbook

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Elsevier Science & Technology

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